Open AccessFocused ion beam modification of atomic force microscopy tips for near-field scanning optical microscopy
Author(s) -
Jeffrey R. Krogmeier,
Robert C. Dunn
Publication year - 2001
Publication title -
applied physics letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.182
H-Index - 442
eISSN - 1077-3118
pISSN - 0003-6951
DOI - 10.1063/1.1430028
Subject(s) - focused ion beam , microscopy , near field scanning optical microscope , scanning ion conductance microscopy , materials science , optics , optical microscope , scanning probe microscopy , conductive atomic force microscopy , light sheet fluorescence microscopy , scanning confocal electron microscopy , field ion microscope , non contact atomic force microscopy , fluorescence microscope , atomic force acoustic microscopy , ion beam , scanning capacitance microscopy , pyramid (geometry) , scanning electron microscope , beam (structure) , optoelectronics , nanotechnology , kelvin probe force microscope , chemistry , magnetic force microscope , fluorescence , ion , atomic force microscopy , physics , magnetization , quantum mechanics , magnetic field , organic chemistry
A probe for near-field scanning optical microscopy is demonstrated based on a high index glass sphere attached to the end of a conventional atomic force microscopy tip. The sphere is machined into a pyramid geometry using a focused ion beam (FIB) instrument, coated with aluminum to confine the excitation light, and milled further with the FIB to open an aperture at the end of the tip. Near-field fluorescence images of 50 nm fluorescent latex spheres reveal subdiffraction limit spatial resolution, illustrating the utility of these probes for near-field scanning optical microscopy.
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