Open AccessDamage buildup in Si under bombardment with MeV heavy atomic and molecular ions
Author(s) -
А.И. Титов,
S. O. Kucheyev,
V.S. Belyakov,
Alexander Azarov
Publication year - 2001
Publication title -
journal of applied physics
Language(s) - English
Resource type - Journals
eISSN - 1089-7550
pISSN - 0021-8979
DOI - 10.1063/1.1404426
Subject(s) - ion , collision cascade , radiation damage , ion implantation , amorphous solid , materials science , atomic physics , cascade , lattice (music) , irradiation , molecular physics , chemistry , sputtering , nuclear physics , crystallography , physics , thin film , nanotechnology , organic chemistry , chromatography , acoustics
Research at StPSTU was supported in part by the Ministry for General and Professional Education of the Russian Federation.
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