Open AccessStructural differences between deuterated and hydrogenated silicon nitride/oxynitride
Author(s) -
An Shih,
Shin-Hung Yeh,
SiChen Lee,
T. Yang
Publication year - 2001
Publication title -
journal of applied physics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.699
H-Index - 319
eISSN - 1089-7550
pISSN - 0021-8979
DOI - 10.1063/1.1364645
Subject(s) - photoluminescence , silicon oxynitride , materials science , silicon nitride , chemical vapor deposition , infrared spectroscopy , silicon , deuterium , absorption (acoustics) , spectral line , infrared , analytical chemistry (journal) , optoelectronics , optics , chemistry , atomic physics , composite material , organic chemistry , physics , astronomy
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