Open AccessNeutron activation analysis for calibration of phosphorus implantation dose
Author(s) -
Rick L. Paul
Publication year - 2001
Publication title -
aip conference proceedings
Language(s) - English
Resource type - Conference proceedings
SCImago Journal Rank - 0.177
H-Index - 75
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/1.1354475
Subject(s) - phosphorus , neutron activation analysis , radiochemistry , silicon , neutron , calibration , neutron flux , neutron activation , materials science , flux (metallurgy) , irradiation , analytical chemistry (journal) , chemistry , nuclear physics , physics , chromatography , metallurgy , quantum mechanics
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