Local Electrode Atom Probes: Prospects for 3D atomic-scale metrology applications in the semiconductor and data storage industries | Zendy

Thomas F. Kelly | Zendy

Open Access

Local Electrode Atom Probes: Prospects for 3D atomic-scale metrology applications in the semiconductor and data storage industries

Author(s) -

Thomas F. Kelly

Publication year - 2001

Publication title -

aip conference proceedings

Language(s) - English

Resource type - Conference proceedings

SCImago Journal Rank - 0.177

H-Index - 75

eISSN - 1551-7616

pISSN - 0094-243X

DOI - 10.1063/1.1354466

Subject(s) - metrology , atom probe , wafer , atom (system on chip) , sample (material) , planar , semiconductor , materials science , nanotechnology , atomic units , scale (ratio) , semiconductor industry , dimensional metrology , semiconductor device fabrication , electrode , computer science , engineering physics , optics , optoelectronics , physics , engineering , manufacturing engineering , computer graphics (images) , embedded system , quantum mechanics , transmission electron microscopy , thermodynamics

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