Open AccessCharacterization of Si/SiO[sub 2] multilayer thin films by grazing incidence X-ray reflectivity
Author(s) -
Toshiyuki Fujimoto
Publication year - 2001
Publication title -
aip conference proceedings
Language(s) - English
Resource type - Conference proceedings
SCImago Journal Rank - 0.177
H-Index - 75
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/1.1354460
Subject(s) - materials science , reflectivity , x ray reflectivity , substrate (aquarium) , surface finish , thin film , surface roughness , optics , incidence (geometry) , silicon , grazing , characterization (materials science) , optoelectronics , composite material , nanotechnology , geology , ecology , biology , oceanography , physics
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