Open AccessAutomated SEM and TEM sample preparation applied to copper/low k materials
Author(s) -
R. Goytia Reyes
Publication year - 2001
Publication title -
aip conference proceedings
Language(s) - Uncategorized
Resource type - Conference proceedings
SCImago Journal Rank - 0.177
H-Index - 75
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/1.1354459
Subject(s) - materials science , sample preparation , scanning electron microscope , sample (material) , copper , computer science , metallurgy , composite material , chromatography , chemistry
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