Open AccessAdvanced FTIR technology for the chemical characterization of product wafers
Author(s) -
P. A. Rosenthal
Publication year - 2001
Publication title -
aip conference proceedings
Language(s) - English
Resource type - Conference proceedings
SCImago Journal Rank - 0.177
H-Index - 75
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/1.1354455
Subject(s) - fourier transform infrared spectroscopy , wafer , characterization (materials science) , materials science , fourier transform spectroscopy , resist , context (archaeology) , analytical chemistry (journal) , process engineering , optoelectronics , computer science , optics , nanotechnology , chemistry , organic chemistry , physics , layer (electronics) , engineering , paleontology , biology
Accelerating Research
Robert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom
Address
John Eccles HouseRobert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom