Open AccessOptical metrology for DMD™ characterization
Author(s) -
Seth A. Miller
Publication year - 2001
Publication title -
aip conference proceedings
Language(s) - Uncategorized
Resource type - Conference proceedings
SCImago Journal Rank - 0.177
H-Index - 75
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/1.1354449
Subject(s) - stiction , computer science , metrology , voltage , digital micromirror device , characterization (materials science) , optics , microelectromechanical systems , materials science , electrical engineering , engineering , optoelectronics , physics
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