Open AccessSemiconductor material applications of rapid x-ray reflectometry (XRR)
Author(s) -
William C. Johnson
Publication year - 2001
Publication title -
aip conference proceedings
Language(s) - Uncategorized
Resource type - Conference proceedings
SCImago Journal Rank - 0.177
H-Index - 75
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/1.1354442
Subject(s) - x ray reflectivity , reflectometry , materials science , metrology , optics , surface roughness , surface finish , optoelectronics , thin film , dielectric , chemical vapor deposition , semiconductor , stack (abstract data type) , monochromator , nanotechnology , composite material , computer science , time domain , wavelength , physics , computer vision , programming language
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