Open AccessCharacterization of BPSG films using Neutron Depth Profiling and Neutron/X-ray Reflectometry
Author(s) -
Huaiyu H. ChenMayer
Publication year - 2001
Publication title -
aip conference proceedings
Language(s) - English
Resource type - Conference proceedings
SCImago Journal Rank - 0.177
H-Index - 75
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/1.1354433
Subject(s) - neutron reflectometry , materials science , neutron , x ray reflectivity , reflectometry , wafer , dopant , silicon , doping , thin film , optics , optoelectronics , analytical chemistry (journal) , chemistry , nanotechnology , neutron scattering , physics , computer vision , time domain , quantum mechanics , small angle neutron scattering , computer science , chromatography
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