Open AccessNew photo-acoustic techniques for improved in-line control of opaque metal film processing
Author(s) -
C. Trouiller
Publication year - 2001
Publication title -
aip conference proceedings
Language(s) - English
Resource type - Conference proceedings
SCImago Journal Rank - 0.177
H-Index - 75
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/1.1354431
Subject(s) - opacity , stack (abstract data type) , wafer , process control , computer science , process (computing) , materials science , wafer scale integration , fabrication , layer (electronics) , line (geometry) , copper interconnect , electronic engineering , acoustics , optoelectronics , optics , nanotechnology , engineering , medicine , physics , alternative medicine , geometry , pathology , mathematics , programming language , operating system
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