Open AccessDefect identification by compositional defect review using auger electron spectroscopy
Author(s) -
Kenton D. Childs
Publication year - 2001
Publication title -
aip conference proceedings
Language(s) - Uncategorized
Resource type - Conference proceedings
SCImago Journal Rank - 0.177
H-Index - 75
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/1.1354417
Subject(s) - wafer , auger electron spectroscopy , materials science , auger , focused ion beam , optoelectronics , analytical chemistry (journal) , ion , chemistry , atomic physics , physics , organic chemistry , nuclear physics , chromatography
Accelerating Research
Robert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom
Address
John Eccles HouseRobert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom