Open AccessDetection of organic contamination on silicon substrates: Comparison of several techniques
Author(s) -
A. Roche,
C. Wyon,
S. Marthon,
J. F. Ple,
Michel Olivier,
N. Rochat,
A. Chabli,
Adrien Danel,
M. Juhel,
F. Tardif
Publication year - 2001
Publication title -
aip conference proceedings
Language(s) - English
Resource type - Conference proceedings
SCImago Journal Rank - 0.177
H-Index - 75
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/1.1354414
Subject(s) - contamination , silicon , wafer , materials science , adsorption , fourier transform infrared spectroscopy , optoelectronics , chemical engineering , chemistry , organic chemistry , ecology , biology , engineering
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