Open AccessITS-90 calibration of radiation thermometers for RTP using wire/thin-film thermocouples on a wafer
Author(s) -
Christopher W. Meyer
Publication year - 2001
Publication title -
aip conference proceedings
Language(s) - English
Resource type - Conference proceedings
SCImago Journal Rank - 0.177
H-Index - 75
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/1.1354407
Subject(s) - thermocouple , emissivity , wafer , calibration , materials science , temperature measurement , rapid thermal processing , optoelectronics , radiation , optics , measurement uncertainty , composite material , physics , quantum mechanics
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