Open AccessCOCOS (corona oxide characterization of semiconductor) non-contact metrology for gate dielectrics
Author(s) -
Marshall Wilson
Publication year - 2001
Publication title -
aip conference proceedings
Language(s) - English
Resource type - Conference proceedings
SCImago Journal Rank - 0.177
H-Index - 75
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/1.1354401
Subject(s) - materials science , dielectric , optoelectronics , wafer , semiconductor , gate dielectric , corona ring , capacitance , voltage , electrical engineering , corona discharge , electrode , physics , engineering , transistor , quantum mechanics
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