Open AccessNon-contact defect diagnostics in Cz-Si wafers using resonance ultrasonic vibrations
Author(s) -
A. E. Belyaev
Publication year - 2001
Publication title -
aip conference proceedings
Language(s) - Uncategorized
Resource type - Conference proceedings
SCImago Journal Rank - 0.177
H-Index - 75
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/1.1354399
Subject(s) - wafer , materials science , vibration , ultrasonic sensor , resonance (particle physics) , acoustics , transducer , harmonic , ultrasonic testing , acoustic resonance , amplitude , resonator , optoelectronics , optics , physics , particle physics
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