Open AccessAn examination of tantalum pentoxide thin dielectric films using grazing incidence x-ray reflectivity and powder diffraction
Author(s) -
Christopher Russell
Publication year - 2001
Publication title -
aip conference proceedings
Language(s) - English
Resource type - Conference proceedings
SCImago Journal Rank - 0.177
H-Index - 75
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/1.1354386
Subject(s) - materials science , tantalum pentoxide , crystallinity , dielectric , diffraction , analytical chemistry (journal) , amorphous solid , x ray reflectivity , crystallite , powder diffraction , x ray crystallography , thin film , tantalum , optics , composite material , crystallography , optoelectronics , nanotechnology , metallurgy , chemistry , physics , chromatography
Accelerating Research
Robert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom
Address
John Eccles HouseRobert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom