Open AccessOptical and electrical thickness measurements of alternate gate dielectrics: A fundamental difference
Author(s) -
Curt A. Richter
Publication year - 2001
Publication title -
aip conference proceedings
Language(s) - English
Resource type - Conference proceedings
SCImago Journal Rank - 0.177
H-Index - 75
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/1.1354385
Subject(s) - dielectric , materials science , gate dielectric , permittivity , characterization (materials science) , optoelectronics , interferometry , metrology , dielectric permittivity , optics , transistor , voltage , electrical engineering , nanotechnology , physics , engineering
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