Impact of the ITRS Metrology Roadmap | Zendy

Alain C. Diebold | Zendy

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Impact of the ITRS Metrology Roadmap

Author(s) -

Alain C. Diebold

Publication year - 2001

Publication title -

aip conference proceedings

Language(s) - English

Resource type - Conference proceedings

SCImago Journal Rank - 0.177

H-Index - 75

eISSN - 1551-7616

pISSN - 0094-243X

DOI - 10.1063/1.1354374

Subject(s) - technology roadmap , metrology , semiconductor industry , lithography , semiconductor device fabrication , integrated circuit , technology forecasting , process (computing) , engineering , interconnection , systems engineering , computer science , manufacturing engineering , electrical engineering , materials science , telecommunications , wafer , physics , business , optoelectronics , marketing , artificial intelligence , optics , operating system

The International Technology Roadmap for Semiconductors (ITRS) provides the semiconductor industry with the timing of critical technology needs for future generations of integrated circuits. The Metrology roadmap in the ITRS describes the measurement needs based on the process requirements found in the Lithography, Front End Processes, Interconnect, and Packaging Roadmaps. This paper illustrates the impact of the Metrology Roadmap on the development of key measurement technology.

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