Open AccessBonding topologies in diamondlike amorphous-carbon films
Author(s) -
Michael P. Siegal,
P. N. Provencio,
D. R. Tallant,
R. L. Simpson,
B. Kleinsorge,
W. I. Milne
Publication year - 2000
Publication title -
applied physics letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.182
H-Index - 442
eISSN - 1077-3118
pISSN - 0003-6951
DOI - 10.1063/1.126250
Subject(s) - materials science , amorphous carbon , amorphous solid , carbon fibers , carbon film , substrate (aquarium) , ion , thin film , deposition (geology) , chemical physics , nanotechnology , composite material , crystallography , chemistry , organic chemistry , composite number , paleontology , oceanography , sediment , geology , biology
The carbon ion energy used during filtered cathodic vacuum arc deposition determines the bonding topologies of amorphous-carbon (a-C) films. Regions of relatively low density occur near the substrate/film and film/surface interfaces and their thicknesses increase with increasing deposition energy. The ion subplantation growth results in mass density gradients in the bulk portion of a-C in the growth direction; density decreases with distance from the substrate for films grown using ion energies < 60 eV and increases for films grown using ion energies > 160 eV. Films grown between these energies are the most diamondlike with relatively uniform bulk density and the highest optical transparencies. Bonding topologies evolve with increasing growth energy consistent with the propagation of subplanted carbon ions inducing a partial transformation of 4-fold to 3-fold coordinated carbon atoms
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