Open AccessSubstitutional carbon reduction in SiGeC alloys grown by rapid thermal chemical vapor deposition
Author(s) -
C. W. Liu,
YuTing Tseng,
Yuelong Huang
Publication year - 1999
Publication title -
applied physics letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.182
H-Index - 442
eISSN - 1077-3118
pISSN - 0003-6951
DOI - 10.1063/1.124987
Subject(s) - materials science , carbon fibers , silicon , chemical vapor deposition , nitrogen , analytical chemistry (journal) , silicon carbide , fourier transform infrared spectroscopy , layer (electronics) , carbide , metallurgy , chemical engineering , composite material , nanotechnology , chemistry , organic chemistry , chromatography , composite number , engineering
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