High-speed force sensor for force microscopy and profilometry utilizing a quartz tuning fork | Zendy

Franz J. Gießibl | Zendy

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High-speed force sensor for force microscopy and profilometry utilizing a quartz tuning fork

Author(s) -

Franz J. Gießibl

Publication year - 1998

Publication title -

applied physics letters

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 1.182

H-Index - 442

eISSN - 1077-3118

pISSN - 0003-6951

DOI - 10.1063/1.122948

Subject(s) - profilometer , deflection (physics) , stylus , microscope , optics , non contact atomic force microscopy , tuning fork , atomic force microscopy , signal (programming language) , acoustics , calibration , materials science , quartz , microscopy , surface finish , computer science , physics , kelvin probe force microscope , vibration , nanotechnology , quantum mechanics , composite material , programming language

Force sensors are key elements of atomic force microscopes and surface profilometers. Sensors with an integrated deflection meter are particularly desirable. Here, quartz tuning forks as used in watches are utilized as force sensors. A novel technique is employed which simplifies the interpretation of the data and increases the imaging speed by at least one order of magnitude compared to previous implementations. The variation of the imaging signal with distance fits well to a Hertzian contact model. Images of compact discs and calibration gratings, which have been obtained with scanning speeds up to 230 μm/s, are presented

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