Open AccessA novel design of piezo-driven dual-dimension optical scanning mechanism
Author(s) -
S. H. Chang,
YiChung Tung
Publication year - 1998
Publication title -
review of scientific instruments
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.605
H-Index - 165
eISSN - 1089-7623
pISSN - 0034-6748
DOI - 10.1063/1.1149092
Subject(s) - optics , materials science , fabrication , vibration , laser scanning , sensitivity (control systems) , piezoelectricity , scanning electron microscope , dimension (graph theory) , mechanism (biology) , scanning force microscopy , laser , acoustics , physics , nanotechnology , electronic engineering , atomic force microscopy , medicine , alternative medicine , mathematics , pathology , quantum mechanics , pure mathematics , composite material , engineering
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