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A compact, intense, monochromatic, atmospheric pressure, extreme ultraviolet light source
Author(s) -
Earl Scime,
M. M. Balkey
Publication year - 1998
Publication title -
review of scientific instruments
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.605
H-Index - 165
eISSN - 1089-7623
pISSN - 0034-6748
DOI - 10.1063/1.1148812
Subject(s) - monochromatic color , extreme ultraviolet , light source , optics , ultraviolet , physics , ultraviolet light , atmospheric pressure , materials science , optoelectronics , laser , meteorology
An intense, monochromatic, extreme ultraviolet (121.6 nm) light source has been constructed for testing extreme ultraviolet light rejecting filters. The source and detection system operates at atmospheric pressure, is physically compact, and is relatively inexpensive to build. A calibrated neutral density filter with a transmission of 1×10−6 is used as a reference. The light source has been used to measure transmissions as small as 9×10−6 quickly (in less than 1 min) with negligible background levels.

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