Open AccessThe electron-beam-plasma ion source as source of negative fluorine
Author(s) -
G.D. Alton,
R. F. Welton,
S. N. Murray,
Baoqun Cui
Publication year - 1998
Publication title -
review of scientific instruments
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.605
H-Index - 165
eISSN - 1089-7623
pISSN - 0034-6748
DOI - 10.1063/1.1148800
Subject(s) - ion source , atomic physics , ionization , ion , plasma , ion beam , beam (structure) , ion beam deposition , materials science , ion gun , electron , cathode , physics , nuclear physics , chemistry , optics , quantum mechanics
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