Open AccessFabrication of mm-wave undulator cavities using deep x-ray lithography
Author(s) -
Jungchul Song,
Alan Feinerman,
Y.W. Kang,
R.L. Kustom,
Barry Lai,
A. Nassiri,
Victor White,
G. M. Well
Publication year - 1996
Publication title -
review of scientific instruments
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.605
H-Index - 165
eISSN - 1089-7623
pISSN - 0034-6748
DOI - 10.1063/1.1147497
Subject(s) - undulator , electroforming , fabrication , thermal emittance , optics , materials science , x ray lithography , liga , wafer , lithography , advanced photon source , optoelectronics , cathode ray , resist , beam (structure) , particle accelerator , physics , electron , nanotechnology , alternative medicine , layer (electronics) , pathology , quantum mechanics , medicine
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