Open AccessVacuum arc ion sources—Micro to macro
Author(s) -
R.A. MacGill,
M.R. Dickinson,
I.G. Brown
Publication year - 1996
Publication title -
review of scientific instruments
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.605
H-Index - 165
eISSN - 1089-7623
pISSN - 0034-6748
DOI - 10.1063/1.1146734
Subject(s) - vacuum arc , ion , materials science , ion beam , ion source , electrode , arc (geometry) , ion beam deposition , extractor , beam (structure) , nanotechnology , optoelectronics , optics , physics , plasma , nuclear physics , mechanical engineering , process engineering , quantum mechanics , engineering
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