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Plasma potentials and performance of the advanced electron cyclotron resonance ion source
Author(s) -
Z. Q. Xie,
C.M. Lyneis
Publication year - 1994
Publication title -
review of scientific instruments
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.605
H-Index - 165
eISSN - 1089-7623
pISSN - 0034-6748
DOI - 10.1063/1.1144583
Subject(s) - atomic physics , electron cyclotron resonance , plasma , ion , argon , electron , materials science , ion source , physics , nuclear physics , quantum mechanics

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