Compact UHV valve with field replaceable windows
Author(s) -
E. Johnson,
John Freeman,
Forbes R. Powell
Publication year - 1992
Publication title -
review of scientific instruments
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.605
H-Index - 165
eISSN - 1089-7623
pISSN - 0034-6748
DOI - 10.1063/1.1143100
Subject(s) - window (computing) , gate valve , optics , materials science , flange , aperture (computer memory) , seal (emblem) , synchrotron radiation , monochromator , mechanical engineering , computer science , optoelectronics , physics , composite material , engineering , art , wavelength , visual arts , operating system
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