Open AccessDevelopment of a dc, broad beam, Mevva ion source
Author(s) -
I.G. Brown,
M.R. Dickinson,
James E. Galvin,
R.A. MacGill
Publication year - 1992
Publication title -
review of scientific instruments
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.605
H-Index - 165
eISSN - 1089-7623
pISSN - 0034-6748
DOI - 10.1063/1.1142948
Subject(s) - ion source , vacuum arc , ion gun , materials science , ion beam deposition , ion beam , atomic physics , ion , beam (structure) , plasma , focused ion beam , ion current , optics , physics , nuclear physics , quantum mechanics
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