Open AccessCharge state distribution studies of the metal vapor vacuum arc ion source
Author(s) -
James E. Galvin,
I.G. Brown,
R.A. MacGill
Publication year - 1990
Publication title -
review of scientific instruments
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.605
H-Index - 165
eISSN - 1089-7623
pISSN - 0034-6748
DOI - 10.1063/1.1141968
Subject(s) - vacuum arc , atomic physics , materials science , current (fluid) , ion , arc (geometry) , cathode , electric arc , ion source , ion current , ion beam , range (aeronautics) , charge (physics) , constant current , beam (structure) , ion beam deposition , electrode , physics , chemistry , optics , thermodynamics , composite material , geometry , mathematics , quantum mechanics
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