Open AccessQuantitative measurement of the composition of AlxGa1−xAs heterostructures using a simple backscattered electron detector
Author(s) -
Peter C. Sercel,
John A. Lebens,
Kerry J. Vahala
Publication year - 1989
Publication title -
review of scientific instruments
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.605
H-Index - 165
eISSN - 1089-7623
pISSN - 0034-6748
DOI - 10.1063/1.1140489
Subject(s) - heterojunction , materials science , detector , optics , electron , x ray absorption spectroscopy , calibration , electron microscope , physics , optoelectronics , absorption spectroscopy , quantum mechanics
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