Open AccessErratum: ‘‘Ultrahigh vacuum arc method to form thin refractory metal films’’ [Rev. Sci. Instrum. 5 4, 221 (1983)]
Author(s) -
Michio Kanayama,
Yuichiro Igarashi
Publication year - 1983
Publication title -
review of scientific instruments
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.605
H-Index - 165
eISSN - 1089-7623
pISSN - 0034-6748
DOI - 10.1063/1.1137200
Subject(s) - refractory metals , vacuum arc , arc (geometry) , materials science , refractory (planetary science) , metal , thin film , plasma , atomic physics , nanotechnology , composite material , metallurgy , physics , nuclear physics , mechanical engineering , engineering
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