Epitaxial growth of B a T i O3 thin films at 600 °C by metalorganic chemical vapor deposition
Author(s) -
Debra L. Kaiser,
Mark D. Vaudin,
L. D. Rotter,
Zhong Lin Wang,
James P. Cline,
Cheol Seong Hwang,
Ryna B. Marinenko,
John G. Gillen
Publication year - 1995
Publication title -
applied physics letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.182
H-Index - 442
eISSN - 1077-3118
pISSN - 0003-6951
DOI - 10.1063/1.113480
Subject(s) - metalorganic vapour phase epitaxy , epitaxy , chemical vapor deposition , substrate (aquarium) , thin film , materials science , combustion chemical vapor deposition , analytical chemistry (journal) , group 2 organometallic chemistry , deposition (geology) , crystallography , chemistry , optoelectronics , carbon film , nanotechnology , layer (electronics) , organic chemistry , oceanography , molecule , geology , paleontology , sediment , biology
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