Open AccessErratum: Excimer laser etching of transparent conducting oxides [Appl. Phys. Lett. 59, 647 (1991)]
Author(s) -
J. G. Lunney,
Richard R. O’Neill,
Karl Schulmeister
Publication year - 1991
Publication title -
applied physics letters
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 1.182
H-Index - 442
eISSN - 1077-3118
pISSN - 0003-6951
DOI - 10.1063/1.106374
Subject(s) - excimer laser , etching (microfabrication) , excimer , materials science , laser , optoelectronics , optics , nanotechnology , physics , layer (electronics)
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