Open AccessX-ray reflectivity studies of SiO2/Si(001)
Author(s) -
T. A. Rabedeau,
I. M. Tidswell,
P. S. Pershan,
J. Bevk,
B. S. Freer
Publication year - 1991
Publication title -
applied physics letters
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 1.182
H-Index - 442
eISSN - 1077-3118
pISSN - 0003-6951
DOI - 10.1063/1.105695
Subject(s) - specular reflection , oxide , materials science , x ray reflectivity , wafer , scattering , silicon , reflectivity , condensed matter physics , analytical chemistry (journal) , molecular physics , optics , chemistry , optoelectronics , thin film , nanotechnology , metallurgy , physics , chromatography
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