Open AccessDirect visual observation of powder dynamics in rf plasma-assisted deposition
Author(s) -
A.A. Howling,
Ch. Hollenstein,
P. Paris
Publication year - 1991
Publication title -
applied physics letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.182
H-Index - 442
eISSN - 1077-3118
pISSN - 0003-6951
DOI - 10.1063/1.105322
Subject(s) - silane , plasma , materials science , trapping , particle (ecology) , deposition (geology) , rf power amplifier , volume (thermodynamics) , dynamics (music) , analytical chemistry (journal) , chemical engineering , optoelectronics , chemistry , composite material , environmental chemistry , nuclear physics , ecology , paleontology , amplifier , oceanography , physics , quantum mechanics , sediment , engineering , biology , geology , acoustics , cmos
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