A NEW ELLIPSOMETRIC PROGRAMME APPLIED TO THE CHARACTERIZATION OF TRANSPARENT CONDUCTING TITANIUM NITRIDE FILMS | Zendy

G. Celotti | Zendy; Roberto Rosa | Zendy; C. Summonte | Zendy; G. Martinelli | Zendy

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A NEW ELLIPSOMETRIC PROGRAMME APPLIED TO THE CHARACTERIZATION OF TRANSPARENT CONDUCTING TITANIUM NITRIDE FILMS

Author(s) -

G. Celotti,

Roberto Rosa,

C. Summonte,

G. Martinelli

Publication year - 1983

Publication title -

le journal de physique colloques

Language(s) - English

Resource type - Journals

eISSN - 2777-3418

pISSN - 0449-1947

DOI - 10.1051/jphyscol:19831057

Subject(s) - characterization (materials science) , materials science , titanium nitride , titanium , nitride , nanotechnology , optoelectronics , metallurgy , layer (electronics)

The optical characterization of TiN films produced on Si substrates by ion-implantation was performed by handling the ellipsometric measurements through a flexible program which well conforms to the various experimental situations. The results obtained on as-implanted and transient thermally annealed films are discussed in relation to different possible technological applications

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