SiC-TiSi2 materials codeposited by CVD
Author(s) -
M. Maline,
F. Teyssandier,
R. Hillel
Publication year - 1993
Publication title -
journal de physique iv (proceedings)
Language(s) - English
Resource type - Journals
eISSN - 1764-7177
pISSN - 1155-4339
DOI - 10.1051/jp4:1993379
Subject(s) - crystallite , extrapolation , materials science , indentation , texture (cosmology) , atmospheric pressure , analytical chemistry (journal) , composite material , mineralogy , chemistry , metallurgy , mathematical analysis , chromatography , computer science , artificial intelligence , image (mathematics) , oceanography , mathematics , geology
SiC - TiSi2 composites were prepared by CVD under atmospheric pressure at 850°C using the TiCl4 - SiH2Cl2 - C4H10 - H2 gas system. Thermodynamical calculation trends, dealing with the influence of the initial gas phase composition on the amount of TiSi2 were compared with the experiments. Codeposits were texture-free. Apparent crystallite size was ranging between 20 to 50nm. Intrinsic hardness deduced from the extrapolation at infinite load of measured values, fitted well with that given by a rule mixture : H∞=VTiSi2.HTiSi2+(l-VTiSi2).HSiC. Using indentation technique, median-radial crack system was observed. Values of toughness were about 35 to 50 % greater than for a pure SiC-CVD depending on the amount of TiSi2
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