Open AccessPANI/ZnO/Quartz structure for Love wave gas sensor
Author(s) -
Francisca C. Moreira,
F. Sarry,
Nicolas Delorme,
O. Elmazria,
Fabienne PoncinEpaillard
Publication year - 2009
Publication title -
the european physical journal applied physics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.216
H-Index - 49
eISSN - 1286-0050
pISSN - 1286-0042
DOI - 10.1051/epjap/2009060
Subject(s) - polyaniline , quartz , materials science , surface acoustic wave , quartz crystal microbalance , acoustics , selectivity , polymer , surface wave , love wave , transducer , layer (electronics) , work (physics) , sensitivity (control systems) , optoelectronics , nanotechnology , optics , composite material , adsorption , electronic engineering , mechanical wave , chemistry , longitudinal wave , physics , wave propagation , mechanical engineering , engineering , organic chemistry , catalysis , polymerization
International audienceEveryone knows the importance of sensors in our society and the huge attempt to improve their properties in order to obtain better sensitivity and selectivity. In this paper, we are more particularly focused on gas sensors based on surface acoustic waves (SAW) device. In a previous work, we have developed and studied a structure composed of a 90° rotated ST quartz crystal covered with a ZnO layer. By developing inter-digital transducers (IDT) on this structure, we can generate different types of acoustic waves. Love waves which are confined near the surface are known to be very sensitives to fluids (liquids or gases). The aim of this work is to present the way we have developed this optimal structure and to test it with a specific polymer. This polymer is polyaniline (PANI). Its main advantage is that it should be deposited by cold pulsed plasma process
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