Low voltage RF MEMS variable capacitor with linear C-V response | Zendy

Amro M. Elshurafa | Zendy; P.H. Ho | Zendy; K. Saláma | Zendy

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Low voltage RF MEMS variable capacitor with linear C-V response

Author(s) -

Amro M. Elshurafa,

P.H. Ho,

K. Saláma

Publication year - 2012

Publication title -

electronics letters

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.375

H-Index - 146

eISSN - 1350-911X

pISSN - 0013-5194

DOI - 10.1049/el.2011.3340

Subject(s) - capacitance , variable capacitor , capacitor , voltage , microelectromechanical systems , materials science , capacitance probe , differential capacitance , electrical engineering , optoelectronics , physics , engineering , electrode , quantum mechanics

An RF MEMS variable capacitor, fabricated in the PolyMUMPS process and tuned electrostatically, possessing a linear capacitance-voltage response is reported. The measured quality factor of the device was 17 at 1GHz, while the tuning range was 1.2:1 and was achieved at an actuation DC voltage of 8V only. Further, the linear regression coefficient was 0.98. The variable capacitor was created such that it has both vertical and horizontal capacitances present. As the top suspended plate moves towards the bottom fixed plate, the vertical capacitance increases whereas the horizontal capacitance decreases simultaneously such that the sum of the two capacitances yields a linear capacitance-voltage relation. © 2012 The Institution of Engineering and Technology

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