RF magnetron sputtered perovskite-oriented PSZT thin films on gold for piezoelectric and ferroelectric transducers | Zendy

Madhu Bhaskaran | Zendy; Sharath Sriram | Zendy; Anthony S. Holland | Zendy

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RF magnetron sputtered perovskite-oriented PSZT thin films on gold for piezoelectric and ferroelectric transducers

Author(s) -

Madhu Bhaskaran,

Sharath Sriram,

Anthony S. Holland

Publication year - 2006

Publication title -

electronics letters

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.375

H-Index - 146

eISSN - 1350-911X

pISSN - 0013-5194

DOI - 10.1049/el:20063422

Subject(s) - materials science , sputter deposition , perovskite (structure) , x ray photoelectron spectroscopy , scanning electron microscope , thin film , ferroelectricity , cavity magnetron , piezoelectricity , optoelectronics , deposition (geology) , substrate (aquarium) , platinum , sputtering , composite material , analytical chemistry (journal) , nanotechnology , dielectric , nuclear magnetic resonance , crystallography , chemistry , oceanography , biology , paleontology , biochemistry , chromatography , catalysis , sediment , geology , physics

Conditions for depositing perovskite-oriented Pb0.92Sr0.08(Zr0.65Ti0.35) O-3 thin films on gold by RF magnetron sputtering are investigated. Deposition results were analysed by scanning electron microscopy, X-ray photoelectron spectroscopy and X-ray diffractometry. It was found that the desired perovskite phase can be obtained at a substrate temperature of 300 degrees C, much lower than the typically reported 650 degrees C for deposition on platinum.

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