Synthesis of volatile, reactive coinage metal 5,5-bicyclic amidinates with enhanced thermal stability for chemical vapor deposition | Zendy

Liuchuan Tong | Zendy; Luke M. Davis | Zendy; Xian Gong | Zendy; Jun Feng | Zendy; Eugene S. Beh | Zendy; Roy G. Gordon | Zendy

Open Access

Synthesis of volatile, reactive coinage metal 5,5-bicyclic amidinates with enhanced thermal stability for chemical vapor deposition

Author(s) -

Liuchuan Tong,

Luke M. Davis,

Xian Gong,

Jun Feng,

Eugene S. Beh,

Roy G. Gordon

Publication year - 2019

Publication title -

dalton transactions

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.98

H-Index - 184

eISSN - 1477-9234

pISSN - 1477-9226

DOI - 10.1039/c9dt01202h

Subject(s) - bicyclic molecule , chemical vapor deposition , thermal stability , metal , chemistry , deposition (geology) , thermal , inorganic chemistry , chemical engineering , materials science , organic chemistry , thermodynamics , paleontology , physics , sediment , engineering , biology

Many microelectronic devices require thin films of silver or gold as wiring layers. We report silver(i) and gold(i) bicyclic amidinate complexes, wherein the constrained ligand geometry lessens the propensity for thermal decomposition. These new volatile compounds provide metallic films of silver and gold during CVD with hydrogen below 230 °C.

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