Thickness dependence of the piezoresistive effect in p-type single crystalline 3C-SiC nanothin films | Zendy

HoangPhuong Phan | Zendy; Dzung Viet Dao | Zendy; Philip Tanner | Zendy; Jisheng Han | Zendy; NamTrung Nguyen | Zendy; Sima Dimitrijev | Zendy; Glenn Walker | Zendy; Li Wang | Zendy; Yong Zhu | Zendy

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Thickness dependence of the piezoresistive effect in p-type single crystalline 3C-SiC nanothin films

Author(s) -

HoangPhuong Phan,

Dzung Viet Dao,

Philip Tanner,

Jisheng Han,

NamTrung Nguyen,

Sima Dimitrijev,

Glenn Walker,

Li Wang,

Yong Zhu

Publication year - 2014

Publication title -

journal of materials chemistry c

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 1.899

H-Index - 128

eISSN - 2050-7534

pISSN - 2050-7526

DOI - 10.1039/c4tc01054j

Subject(s) - materials science , single crystal , gauge factor , piezoresistive effect , thin film , composite material , type (biology) , crystallography , nanotechnology , fabrication , ecology , chemistry , biology , medicine , alternative medicine , pathology

This paper reports, for the first time, the piezoresistive effect of p-type single crystalline 3C-SiC nanothin films grown by LPCVD at low temperature. Compared to thick SiC films, the gauge factors of the 80 nm and 130 nm films decreased remarkably. This result indicates that the crystal defect at the SiC/Si interface has a significant influence on the piezoresistive effect of ultra-thin film p-type 3C-SiC.Griffith Sciences, Griffith School of EngineeringNo Full Tex

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