Plastic masters—rigid templates for soft lithography
Author(s) -
Salil P. Desai,
Dennis M. Freeman,
Joel Voldman
Publication year - 2009
Publication title -
lab on a chip
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 2.064
H-Index - 210
eISSN - 1473-0197
pISSN - 1473-0189
DOI - 10.1039/b822081f
Subject(s) - fabrication , soft lithography , molding (decorative) , lithography , cleanroom , materials science , microfluidics , nanotechnology , fluidics , pdms stamp , photolithography , engineering drawing , mechanical engineering , engineering , optoelectronics , composite material , electrical engineering , medicine , alternative medicine , pathology
We demonstrate a simple process for the fabrication of rigid plastic master molds for soft lithography directly from (poly)dimethysiloxane devices. Plastics masters (PMs) provide a cost-effective alternative to silicon-based masters and can be easily replicated without the need for cleanroom facilities. We have successfully demonstrated the use of plastics micromolding to generate both single and dual-layer plastic structures, and have characterized the fidelity of the molding process. Using the PM fabrication technique, world-to-chip connections can be integrated directly into the master enabling devices with robust, well-aligned fluidic ports directly after molding. PMs provide an easy technique for the fabrication of microfluidic devices and a simple route for the scaling-up of fabrication of robust masters for soft lithography.
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