Template-Assisted Three-Dimensional Nanolithography via Geometrically Irreversible Processing | Zendy

Xindi Yu | Zendy; Huigang Zhang | Zendy; John K. Oliverio | Zendy; Paul V. Braun | Zendy

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Template-Assisted Three-Dimensional Nanolithography via Geometrically Irreversible Processing

Author(s) -

Xindi Yu,

Huigang Zhang,

John K. Oliverio,

Paul V. Braun

Publication year - 2009

Publication title -

nano letters

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 4.853

H-Index - 488

eISSN - 1530-6992

pISSN - 1530-6984

DOI - 10.1021/nl9027236

Subject(s) - nanolithography , template , nanoring , materials science , etching (microfabrication) , nanotechnology , colloidal crystal , photonic crystal , template method pattern , conformal map , optoelectronics , fabrication , colloid , chemical engineering , medicine , mathematical analysis , alternative medicine , mathematics , pathology , layer (electronics) , engineering

An innovative and versatile nanofabrication technique based on template assisted three-dimensional (3D) nanolithography is presented that takes advantage of the irreversibility of conformal growth and conformal etching at locations with negative surface curvatures in 3D templates. Using colloidal crystals as templates, nanoring particles are generated with quantity much higher than conventional methods. Relying on the same principle, metallodielectric photonic crystals with discrete metal elements are fabricated that show strong absorption in the near-IR and transmission at longer wavelengths.

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