Atomic Layer Deposition to Fine-Tune the Surface Properties and Diameters of Fabricated Nanopores | Zendy

Peng Chen | Zendy; Toshiyuki Mitsui | Zendy; Damon B. Farmer | Zendy; J. A. Golovchenko | Zendy; Roy G. Gordon | Zendy; Daniel Branton | Zendy

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Atomic Layer Deposition to Fine-Tune the Surface Properties and Diameters of Fabricated Nanopores

Author(s) -

Peng Chen,

Toshiyuki Mitsui,

Damon B. Farmer,

J. A. Golovchenko,

Roy G. Gordon,

Daniel Branton

Publication year - 2004

Publication title -

nano letters

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 4.853

H-Index - 488

eISSN - 1530-6992

pISSN - 1530-6984

DOI - 10.1021/nl0494001

Subject(s) - nanopore , atomic layer deposition , deposition (geology) , materials science , layer (electronics) , nanotechnology , polyelectrolyte , surface charge , molecule , yield (engineering) , chemical engineering , analytical chemistry (journal) , chemistry , polymer , composite material , organic chemistry , paleontology , sediment , engineering , biology

Atomic layer deposition of alumina enhanced the molecule sensing characteristics of fabricated nanopores by fine-tuning their surface properties, reducing 1/f noise, neutralizing surface charge to favor capture of DNA and other negative polyelectrolytes, and controlling the diameter and aspect ratio of the pores with near single Ångstrom precision. The control over the chemical and physical nature of the pore surface provided by atomic layer deposition produced a higher yield of functional nanopore detectors.

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