Open AccessFabrication of a Carbon Nanotube-Embedded Silicon Nitride Membrane for Studies of Nanometer-Scale Mass Transport
Author(s) -
Jason K. Holt,
Aleksandr Noy,
Thomas Huser,
D. J. Eaglesham,
Olgica Bakajin
Publication year - 2004
Publication title -
nano letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 4.853
H-Index - 488
eISSN - 1530-6992
pISSN - 1530-6984
DOI - 10.1021/nl048876h
Subject(s) - carbon nanotube , membrane , materials science , silicon nitride , permeance , nanotube , nanotechnology , nanoporous , chemical engineering , nanometre , knudsen diffusion , silicon , composite material , chemistry , permeation , porosity , optoelectronics , layer (electronics) , biochemistry , engineering
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