Colloid Monolayers as Versatile Lithographic Masks
Author(s) -
Frank Burmeister,
Claudia Schäfle,
Thomas Matthes,
Matthias Böhmisch,
Johannes Boneberg,
P. Leǐderer
Publication year - 1997
Publication title -
langmuir
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.042
H-Index - 333
eISSN - 1520-5827
pISSN - 0743-7463
DOI - 10.1021/la9621123
Subject(s) - monolayer , colloid , materials science , lithography , substrate (aquarium) , nanotechnology , wetting , indium tin oxide , gold colloid , transmission electron microscopy , chemical engineering , nanoparticle , layer (electronics) , colloidal gold , composite material , optoelectronics , engineering , oceanography , geology
Hexagonally closed packed monolayers of colloids have found more and more applications, e.g. as lithographic masks. The monolayers are usually produced with the help of a self-organizing process where a suspension of colloids is applied to the desired substrate and left to dry. This method requires a good wettability and smoothness of the substrate, which severely limits the number of possible substrates. We present a new method for the application of colloid monolayers to almost any surface where these difficulties are circumvented. At first the monolayers are fabricated on glass substrates and afterwards floated off on a water surface. From there, they are transferred to the desired substrate. Examples where transferred monolayers were used as lithographic masks are shown on glass, indium tin oxide, and tungsten diselenide. The transfer of a colloid monolayer to a copper grid for transmission electron microscopy demonstrates the applicability of the technique to curved surfaces as well.
Accelerating Research
Robert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom
Address
John Eccles HouseRobert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom